ACCELEROMETER Russian patent published in 2011 - IPC G01P15/97 

FIELD: physics.

SUBSTANCE: accelerometer has an elastically deformable element 1 made from piezoelectric material, attached on one side to a holder 2, and on the other side to an inertial mass 3. The elastically deformable element 1 has on both sides identical cuts 4 and 5, over which low-temperature glass soldering is used to symmetrically attach ends of plates 6 and 7 of measuring piezoelectric elements with SAW or VAW - structures with possibility of their longitudinal compression-stretching. The holder 2 and the inertial mass 3 may be made from material of the elastically deformable element - piezoelectric material, and their crystallographic axes are aligned identically with crystallographic axes of the elastically deformable element 1 and plates 6 and 7. The material of the elastically deformable element 1 may be a metal alloy with constant modulus of elasticity in the working temperature range, and plates 6 and 7 are attached by their ends using glue or glass-to-metal soldering. The material of the elastically deformable element 1 may be a composite material on which there is a metal layer. Plates 6 and 7 are attached by their ends by soldering and their electrodes are made by etching the metal layer of the elastically deformable element. The inertial mass 3 may be an elongated section of the elastically deformable element 1. Plates 6 and 7 may be attached by their ends in rectangular cuts 4 and 5 flush with surfaces of the elastically deformable element and with a gap to the bottom of these cuts.

EFFECT: reduced measurement error, high accuracy and sensitivity of the device.

16 cl, 3 dwg