DEVICE FOR CONTACTLESS MEASUREMENT OF RESISTIVITY OF SILICON MATERIAL Russian patent published in 2011 - IPC G01R27/16 

FIELD: physics.

SUBSTANCE: device for measuring resistivity of semiconductor material, comprising a sensor which is a cylindrical container made from nonmagnetic material, inside of which the measurement object is placed, and on whose outer lateral surface of which there is a first and a second coil, an induced signal detector, the input of which is switched with the second coil, characterised by that the first and second coils are made from conducting nonmagnetic material and are a bifilar coil, wherein the first and second coils are switched with a signal generator and the induced signal detector through a double-channel electronic switch which is also included in the device, which enables re-switching with given on-off ratio of the first and second coils between the signal generator and the induced signal detector.

EFFECT: high sensitivity.

4 dwg