DEVICE FOR NONCONTACT MEASUREMENT OF SPECIFIC RESISTANCE OF SEMICONDUCTOR MATERIALS Russian patent published in 2011 - IPC G01R27/16 

FIELD: electricity.

SUBSTANCE: device for noncontact measurement of specific resistance of semiconductor material, which consists of signal generator to the outlet of which the first coil is connected, recorder of produced signal, to the input of which the second coil is connected. At that, the first and the second coils are arranged coaxially, and measurement object is arranged before coils. Distance between the first and the second coils is fixed; at that, the first and the second coils are switched to signal generator and recorder of produced signal by means of additional two-channel electronic switch introduced to the device, which with the specified pulse duration connects in turn the first and the second coils to signal generator and to recorder of produced signal. The first and the second coils are identical and made in the form of flat spirals, and their frame and winding are made from non-magnetic materials, for example from plastic and copper wire respectively.

EFFECT: improving accuracy of noncontact measuring device.

4 dwg