FIELD: physics.
SUBSTANCE: automatic focusing method employs operating radiation (OR) and probe radiation (PR), which is directed onto a 3D optical surface; the convergence/divergence behaviour of PR reflected from the 3D surface is analysed; an actuating element control signal is selected; the focusing lens is moved such that OR is best focused on the 3D surface. Before entering the focusing lens, the PR is shifted in parallel to OR depending on the angle of inclination of the 3D surface. PR reflected from the 3D surface is directed into an a radiation convergence/divergence analyser using a module through which the PR is shifted in parallel to the OR. The portion of radiation directed into the analyser is directed into a position-sensitive photodetector, the output signal of which is used to control the module which shifts the PR in parallel to the OR.
EFFECT: wider range of stable operation of devices realising said method.
1 dwg
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Authors
Dates
2012-04-10—Published
2010-04-02—Filed