DEVICE TO CONTROL ROUGHNESS OF DIELECTRIC SUBSTRATE SURFACES Russian patent published in 2012 - IPC G01N21/88 G01B11/30 

FIELD: instrument making.

SUBSTANCE: device makes it possible to control quality of substrate surfaces and may find application in optical instrument making, for instance, to monitor quality of preparing surfaces of substrates in integral-optical devices, laser mirrors, etc. An investigated substrate is arranged on a support. In the upper half plane relative to the substrate there are two sources of light equipped with scattering filters, so that horizontal projections of axes of these sources were perpendicular. The third source of light is installed under the substrate coaxially with a video camera.

EFFECT: described location of sources of light increases accuracy and efficiency and makes it possible to measure roughness of large number of substrate types.

3 cl, 3 dwg