METHOD OF MEASURING ELECTRODE SPACING IN VACUUM-TUBE DEVICES Russian patent published in 2012 - IPC G01B11/14 

FIELD: physics.

SUBSTANCE: method involves obtaining a digital optical image of electrodes at an observation angle α to the vertical, which enables to view the lower electrode, said image having a calibration bar. Distances t₁ and t₂ between the upper and lower edges of the upper and lower electrodes, respectively, and the distance h between images of the lower edge of the upper electrode and the upper edge of the lower electrode on the image are determined. The observation position is turned by an azimuthal angle of 180 degrees in the horizontal plane. Images of the reverse side of the electrodes, having a calibration bar, are obtained. Distances and between the upper and lower edges of the upper and lower electrode, respectively, on the obtained images are determined; the value of the electrode spacing is calculated using the relationship where β is the angle of deviation of the plane in which the electrode element lies from the horizontal, obtained from the relationship: where i=1 for the upper electrode and i=2 for the lower electrode.

EFFECT: broader functional capabilities of measuring spacing of electrodes which completely overlap and lie at a small distance one on top of the other on the vertical in order to control quality of produced vacuum-tube devices.

2 cl, 4 dwg