THERMAL GAS MICROFLOWMETER Russian patent published in 2013 - IPC G01F1/69 

FIELD: measurement equipment.

SUBSTANCE: thermal gas microflowmeter includes housing 1 with heat exchanger 2 of controlled power with a heating spiral, which is located in it, gas distributing chamber 3 and two measuring channels 4 and 5 and two temperature compensation channels 6 and 7, which are tightly connected to the above gas distributing chamber and which include the appropriate thermally sensitive elements in the form of identical thermistors, as well as power control unit 15 and output signal conversion unit. The latter is made in the form of a resistance voltage divider pattern, the elements of which are in-series connected thermistors in measuring channels and resistor of the specified value. On external walls of channels the additional arrangement is made for heaters 13, 13', 14, 14' connected in series to the spiral of heating element in heat exchanger.

EFFECT: improving the measurement accuracy and increasing sensitivity of output signal of flow metre.

1 dwg