FIELD: measurement equipment.
SUBSTANCE: absolute pressure transducer consists of a vacuum chamber formed with transducer housing and a diaphragm connected through a stock to the lever end of diaphragm leverage piezoconverter, which is arranged inside vacuum chamber having a limit stop protecting the diaphragm against overload. Vacuum chamber has a "Э"-shaped cross section. Piezoconverter has a T-shaped cross section. Upper part of piezoconverter is provided with a diaphragm with an attached sensitive element with Wheatstone electric bridge from thin-film silicon resistive strain gauges. Piezoconverter lever end is located in lower part of the chamber opposite the housing diaphragm.
EFFECT: improving measurement accuracy of low pressures at overloads as well, which exceed the measured pressure range by many times.
1 dwg
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RU2362236C1 |
