DIFFERENTIAL AND ABSOLUTE PRESSURE SENSOR WITH OVERLOAD PROTECTION Russian patent published in 2024 - IPC G01L9/06 

FIELD: measuring.

SUBSTANCE: invention relates to measurement equipment, in particular to pressure transducers, and can be used in various fields of science and technology related to measurement of both pressure difference and absolute pressure of medium. Pressure sensor comprises a housing in which there are two cavities filled with a low-compressible fluid, wherein each cavity is sealed with a pressure-sensitive shaped membrane with a gap relative to the shaped bases. Also, in the housing there is a measuring unit having a T-shape and consisting of two semiconductor strain-sensitive elements based on a silicon-on-silicon structure, one of which is sensitive to pressure difference and the other to static pressure. In order to increase strength to the effect of overload pressure, as well as to mechanical and temperature effects, locking elements are introduced into the design of the measuring membrane, which are located on opposite sides of the measuring membranes, wherein the measuring unit is fixed on the pressure sensor housing by means of a disk spring, and adjustable stops are installed on the sensor housing on the side of the strain transducer sensitive to static pressure.

EFFECT: high resistance of the sensor to overload pressures and thermomechanical effects.

1 cl, 3 dwg