DEVICE FOR MEASURING LINEAR AND ANGULAR DISPLACEMENTS OF OBJECT (VERSIONS) Russian patent published in 2013 - IPC G01B9/02 G01B11/00 

FIELD: physics.

SUBSTANCE: device according to the first version has a photodetector and a coherent radiation source whose flux is directed on a main beam-splitting face which transmits a first beam having a first polarisation without change in direction and reflects a second beam having a second polarisation which is orthogonal to the first. The main beam-splitting face is capable of occupying two mutually perpendicular positions. On the path of the first beam there is a right mirror which directs the first beam in an autocollimating path onto a right reflector mounted on the object. Between the main beam-splitting face and the right reflector, there is a right quarter-wave plate. On the path of the second beam, which is defined by the second position of the main beam-splitting face, there is a left mirror which directs the second beam onto a left reflector mounted on the object. Between the main beam-splitting face and the left reflector, there is a left quarter-wave plate. There is a photodetector on the path of said beams after superposition thereof. Linear and angular displacements of the object are respectively determined from the obtained interference patterns. The device according to the second version has two beam-splitting faces lying according to the first and second positions of the beam-splitting face in the device according to the first version.

EFFECT: high accuracy of measuring linear and angular displacement of an object.

15 cl, 2 dwg