INTERFEROMETER FOR MEASURING LINEAR DISPLACEMENTS OF SCANNER OF PROBE MICROSCOPE Russian patent published in 2016 - IPC G01B9/02 G01Q20/02 

FIELD: measuring equipment.

SUBSTANCE: invention is intended for measuring linear displacements in three inter-orthogonal axes. Interferometer has a single-frequency laser, collimator for radiation input into transport fibre, a collimator, delivery radiation in optical circuit, an acoustic and optic modulator which generates a reference and measuring arms of interferometer, a polarisation beam splitter to diverge beams at distance sufficient for their independent use mirrors, system of mirrors, which is located around piezoelectric table, triple-prism, mounted on piezoelectric table so that their axes of symmetry passing through centre of rotation of piezoelectric table, photodetectors connected to appropriate measuring inputs of phase meters, as well as shear frequency generator connected to acoustic-optical modulator and the reference input of a phase meter.

EFFECT: reduced dimensions of optical system, reduced self-noise due to reduced vibrations of values of refraction index of air and reduction of Abbe error.

1 cl, 1 dwg