FIELD: measuring equipment.
SUBSTANCE: invention relates to measurement equipment and a device for measuring angular movements of an object. Device includes a coherent radiation source, a light beam expander, a beam splitter, which transmits without changing the direction the first beam and reflects the second beam, a mirror installed on the path of the second beam, two installed on the measured object corner reflectors, an interference pattern receiver, a signal filtration and amplification unit, a comparator and end position sensors. All optical components, holders for them and housings of the interferometer are made from materials with low and close in value to each other thermal expansion coefficients.
EFFECT: technical result is the improvement of accuracy of measurements.
3 cl, 1 dwg
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Authors
Dates
2016-11-10—Published
2015-09-14—Filed