FIELD: physics.
SUBSTANCE: system has a processing module, a first measurement module mounted on a first element and having a radiation unit for a beam of optical radiation, a second measurement module mounted on a second element and having a position-sensitive detector for determining at least one coordinate of the image of the beam in a Cartesian coordinate system within the detection range on the detection plane of the detector, and an optical element which enables to convert the beam before incidence thereof in the detection region on the detection plane. As a result of the conversion, the image of the beam on the detection plane is scale-converted on two mutually perpendicular axes lying in that plane and having different scaling factors, wherein said coordinate of the image of the converted beam is a coordinate which determines the position of the corresponding one of said scaling axes in the Cartesian coordinate system on said detection plane.
EFFECT: simple setup process, wider measurement range and low cost of the system.
37 cl, 3 dwg
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Authors
Dates
2013-05-20—Published
2011-05-30—Filed