FIELD: measurement technology. SUBSTANCE: frequency of light of one of interfering bundles of rays is shifted by specified value, interfered light in assemblage of points of interference plane is transformed into changing electric signals, phases of obtained signals are measured, measurement results are approximated by means of degree polynominal and optical characteristics of optical element are calculated from found coefficients of polynominal. Device for implementation of method has computer ensuring control and processing of results. Another variant of method suggests shift of axis of reference bundle in parallel relative to axis of measurement bundle by specified value and in specified direction in plane of interference picture with sequential change of angle of specified direction of shift and measurement of distribution of phases in plane of interference picture and determination of optical characteristics of optical element for each of these directions by results of measurements. Device for realization of given variant of method includes unit shifting axes of reference bundle, changing angle of direction of shift and computer. EFFECT: increased accuracy and expanded functional capabilities while determining optical characteristics of optical elements. 15 cl, 7 dwg
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Authors
Dates
1997-04-27—Published
1993-07-06—Filed