FIELD: physics.
SUBSTANCE: device has an illuminator, a condenser, a master spatial filter, an analysing spatial filter and a receiver-recording unit. The master and analysing spatial filters are superimposed and are in form of a symmetrical mirror mark deposited on a thin plane-parallel optical plate. The geometric centre of the mark is superimposed with the intersection point of optical axes of the illuminator and the receiver-recording unit. The plate is arranged such that its flat surface with the deposited symmetrical mirror mark makes different angles with optical axes of the illuminator and the receiver-recording unit.
EFFECT: high accuracy of controlling the shape of surfaces of optical components and simple adjustment of the control scheme due to structural superposition of the master and analysing spatial filters.
3 dwg
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Authors
Dates
2013-10-27—Published
2012-06-14—Filed