METHOD OF INTERFEROMETRIC MEASUREMENT OF DEVIATION OF FORM OF OPTICAL SURFACES AND SYSTEM FOR REALIZATION OF SAID METHOD Russian patent published in 2004 - IPC

FIELD: technology for detecting deviations of optical surfaces.

SUBSTANCE: system has radiation source, light dividing block, device for changing optical length of beam drive, first condensing filter, consisting of condensing lens, in focal plane of which a stop is mounted, first and second light-dividing elements, interferometer, consisting of controlled and standard surfaces, first projecting system, which together with objective projects first interference picture to registering block and monitoring device and system for projecting autocollimating images. Light dividing block forms three channels parallel to optical axis, in two of which condensing filters identical to first one are mounted, and device for changing optical length of beam drive is mounted only in second channel, light dividing elements are placed after condensing filters, while into system additionally installed are dividing prism, second projecting system for projecting image of second interference picture to registration block, and connection prism mounted between projecting systems and registration block.

EFFECT: monitoring of changes of static and measurement of dynamic deformations, simplified construction, higher reliability.

2 cl, 3 dwg