SCANNING INTERFEROMETER FOR MEASURING DEVIATION OF OPTICAL SURFACES SHAPE Russian patent published in 2005 - IPC

FIELD: optics.

SUBSTANCE: device has coherent emission source, first condensing filter, consisting of condensing lens, first and second light-splitting elements, objective, interferometer, consisting of standard and controlled surface, device for measuring optical beam drive length, first projection system, registering block and system for processing interference image, system for projecting auto-collimation images. Also provided is additional condensing filter, mounted in focal plane of objective, device for changing optical length of beam drive is positioned behind the laser, made in form of two transparent diffraction grids, one of which can move in direction, perpendicular to grid rows, first diffraction grid divides emission on two beams, each of which gets on to lenses of condensing filters, while controlled and standard surfaces are deflected relatively to normal line to optical axis.

EFFECT: broader functional capabilities, higher efficiency.

5 dwg