SHADOW MASK FIXED ON SUBSTRATE BY MAGNETIC METHOD Russian patent published in 2013 - IPC C23C16/04 

Abstract RU 2502830 C2

FIELD: electricity.

SUBSTANCE: device for deposition of laterally structured layers onto a substrate by means of a shadow mask, applied in a surface manner onto the surface of the substrate designed for application of the coating, includes a substrate holder. The substrate holder has the first magnetic zones designed for magnetic attraction of the second magnetic zones of the shadow mask that correspond to these first magnetic zones. The first magnetic zones are made as capable of being put into an active position with attraction of the second magnetic zones to the surface of the substrate and with the capability of putting into inactive position for application or removal of the shadow mask. Besides, the first magnetic zones are formed by permanent magnetic elements, in particular, arranged in grooves of the contact surface of the substrate holder, and they in their location correspond to the second magnetic zones. The shadow mask includes links of magnetic material arranged in the form of a net, the contact surface of which changes into the concave or inclined side surface of the links.

EFFECT: invention provides for application of a mask onto a surface of a substrate without gaps.

12 cl, 15 dwg

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RU 2 502 830 C2

Authors

Gersdorff Markus

Franken Val'Ter

Offermanns Arno

Dates

2013-12-27Published

2009-09-23Filed