METHOD OF MEASURING THE VUV RADIATION SOURCE INTENSITY AND DEVICE TO THIS END Russian patent published in 2014 - IPC H01J47/02 

FIELD: instrumentation.

SUBSTANCE: method of measuring the VUV radiation source intensity in flow ionisation chamber irradiated by said source comprises gating the ionised substance flow through said chamber to measure ionisation current so that VUV radiation flow is calculated from ionisation current and quantum release magnitude. Mix of gas is gated through ionisation chamber, transparent for VUV radiation and with content of ionised substance of 1000 to 10000 ppm at pressure not lower than barometric one. Note here that mix additionally comprises the VUV radiation absorbing component but not ionised hereby, its concentration making 0.5-20.0 vol. %. Proposed device comprises flow ionisation chamber with VUV radiation source to irradiate the chamber inner space, two electrodes to measure ionisation current and branch pipe to feed and discharge ionized substance. Additionally, proposed device comprises cylinder containing the mix of gas transparent for VUV radiation with ionised substance. Its concentration makes 1000 to 10000 ppm at pressure not lower than barometric one. Note also that gas flow fed into ionisation chamber accommodates flow rate regulator and gas flow meter.

EFFECT: higher precision.

7 cl, 2 dwg