METHOD FOR DETERMINING CRYSTALLINE PHASE IN AMORPHOUS FILMS OF NANODIMENSIONAL THICKNESS Russian patent published in 2014 - IPC G01N27/00 B82B1/00 

FIELD: nanotechnologies.

SUBSTANCE: bombardment of a surface with an ion beam and recording of intensity of reflected ions is performed; besides, analysed surface is bombarded with inert gas ions with energy of less than 100 eV, and energy spectrum of reflected ions is recorded in the energy range, which is higher than energy of primary ions; then, as per energies of peaks of pair collision in the obtained spectrum there determined are types of atoms in one upper monolayer of atoms, as per the available peak with energy equal to energy of bombarding ions there evaluated is availability of a crystalline phase on amorphous or amorphised surface, including in a film of nanodimensional thickness, and as per the ratio of values of the above peak without any energy losses to a peak or peaks of pair collision there determined is surface concentration of crystalline phase on amorphous or amorphised surface.

EFFECT: reduction of depth of an analysed layer till sub-nanodimensional values; improvement of reliability of analysis results and enhancement of compatibility of equipment for implementation of the method with other analysis methods and process equipment.

2 dwg