STRAIN GAGE PRESSURE SENSOR BASED ON THIN-FILM NANO- AND MICROELECTROMECHANICAL SYSTEM Russian patent published in 2014 - IPC G01L19/00 

FIELD: electricity.

SUBSTANCE: strain gage pressure sensor based on a thin-film nano- and microelectromechanical system. This pressure sensor is intended for use in high vibratory accelerations and wide range of transient temperatures of environment and target medium. The invention concept is as follows: a jumper cable 5 is made as four twisted copper silver plated current-carrying conductors insulated by fluorine plastic or polyimide with a lay length not exceeding the length of the jumper cable, and the common screen 12 as an armour of copper silver plated wires protected by a fluorine plastic or polyimide-fluorine plastic film 13. A cavity 9 between a terminal board 4, an expanded part 10 and walls of a bushing 6 is filled with polymer material with the coefficient of heat conductivity 10 times less than the coefficient of heat conductivity of the bushing material. The lateral side of a sleeve nut in the area adjoining to the butt end 14 of the sleeve nut 2 closest to the bushing 6 is made as a straight circular conical surface 15 limited from the bushing side by the butt end 14 of the sleeve nut 2 at one side and the sleeve nut 2 matching a hexagon 16 at the other side, at that the axis of the conical surface coincides with the longitudinal axis 17 of the sensor and an angle between the generatrix of the conical surface 15 and the longitudinal axis 17 of the sensor is equal to an angle of a tube hole 8 location in regard to the longitudinal axis 17 of the sensor. A sensory element 1 is made so that the lateral side square area 18 in its receiving cavity and membrane 19 meet the ratio S_L=(10…14)S_M, S_M=(7…20)10^-6 m² - square area of the membrane. Besides, radius r₀ of the conical surface 15 in the plane of the butt end of the sleeve nut 2 closest to the bushing 6 is made as per the claimed ratio and the sensory element 1 is made so that the lateral side square area 18 of its receiving cavity and membrane 19 meet the ratio S_L=13,4 S_M, S_M=12.56·10^-6 m².

EFFECT: reducing error of the pressure sensor at impact of high vibratory accelerations and wide range of transient temperatures of environment and target medium, reducing weight and warm-up time of the sensor.

2 cl, 3 dwg