MANUFACTURING METHOD OF THIN-FILM PRESSURE SENSOR Russian patent published in 2013 - IPC G01L9/00 

FIELD: measurement equipment.

SUBSTANCE: when manufacturing a thin-film pressure sensor, shaping of strain elements is performed using a template of a strain sensitive layer having configuration of strain elements in the zones combined with low-resistivity jumpers and contact platforms in the for of straps including images of strain elements and their continuation in two opposite directions. In the zones combined with contact platforms the template has the configuration partially coinciding with configuration of contact platforms and remote from straps of the sections. Output conductors are connected to contact platforms in areas remote from straps of the sections. Contacts of sealed lead-outs or their parts are made, which are located symmetrically to their longitudinal axes and contacting the output conductors and wires connecting the sealed lead-outs to an external measuring circuit from material with maximum possible high heat conductivity coefficient, which has minimum possible difference of thermo-emf coefficients with materials of output conductors and wires. Contacts are maintained with high-temperature solder, and then, they are bonded into the housing of a feedthrough connector by means of polymer material, soaked with anaerobic material after complete polymerisation, and output conductors are connected to contacts of sealed lead-outs using one-sided contact welding-soldering with a double electrode.

EFFECT: possibility of using the proposed invention in different spheres of science and technique, which are related to pressure measurement under conditions of action of non-stationary temperatures and increased vibratory accelerations.

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