METHOD OF MONITORING WIDTH OF TOPOLOGICAL FEATURES Russian patent published in 2014 - IPC G06K9/36 G03F1/84 G01N21/88 

FIELD: physics.

SUBSTANCE: method comprises steps of scanning a monitored surface; setting monitoring points on topological features and on background areas according to a reference, wherein background points associated with the monitoring points are assigned a zero index; performing compression by a value equal to half the allowable width of the topological feature with a single-layer window, the brightness of the centre point of which is replaced with zero; if there is a point in the window with a zero index, after carrying out a number of indexation cycles -compression equal to half the discrete number of the allowable width of the topological feature, performing connectivity check.

EFFECT: high accuracy of monitoring the width of features and clearances.

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