FIELD: metallurgy.
SUBSTANCE: unit includes a chamber with a workpiece accumulator and a device for their one-by-one supply for sputtering, a chamber with a workpiece rotation mechanism in the form of two supporting drive pulleys with a pressure roller and a mechanism for the longitudinal supply of the workpiece with a pusher, a fusion chamber with a plasmatron directed to the end face of the workpiece being sputtered. The chamber with the workpiece accumulator is provided with a rotary lock that separates it from the chamber with mechanisms of rotation and longitudinal supply of the workpiece. The fusion chamber is provided with a gas recirculation unit including a fan, a cooler and moisture freezing-out traps. The plasmatron is provided with a mechanism of movement in longitudinal and transverse directions relative to the workpiece, as well as a control device of a gap between the end face of the workpiece and the plasmatron. The supporting pulleys of the workpiece rotation mechanism are provided with vibration-absorbing rings contacting the workpiece, and the pusher of the longitudinal supply mechanism is made in the form of a pressure roller with a flange.
EFFECT: improving the operating reliability of the unit due to the reduction of a level of vibrations in fast mechanisms; improving the quality and yield of powder.
2 cl, 4 dwg, 1 tbl
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Authors
Dates
2015-04-27—Published
2013-12-24—Filed