FIELD: measurement equipment.
SUBSTANCE: method may be used in scanning probing microscopy for determination of electric voltage, modulus of elasticity, hardness, viscosity, plasticity of piezoelectric materials, components of micro and nanoelectromechanical systems, as well as biomicroelectromechanical devices. Nanoindentation of the material is done with a stiff indentor with continuous speed. Simultaneously they measure change of electric voltage and contact force as the indentor is pressed into the material, for instance, piezoelectric. Measurements are made at least for two temperatures of the material.
EFFECT: expansion of functional capabilities of material properties detection by nanoindentation, possibility to determine load value that results in phase transition.
2 cl, 5 dwg
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