FIELD: physics.
SUBSTANCE: apparatus comprises a base, mounting pads and sensitive elastic sets with a cavity, connected to each other by tubes into at least two circular loops which are divided into three sectors, and to a compressed air system. Each sensitive elastic set is in the form of a metal cup with a blind hole at the bottom, two through-holes in the wall and with an elastic rubber-textile sheet, pressed on the top by a rigid ring to form a membrane with a rigid support placed thereon. Compressed air is fed into sets of each circular loop at a different pressure. Pressure is controlled from readings of force sensors installed in each circular loop.
EFFECT: simple design of the apparatus and providing high accuracy of the processed mirror surface.
5 cl, 4 dwg
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