FIELD: measurement equipment.
SUBSTANCE: electronic module temperature sensor includes an emitter, a radiation receiver, a wave guide channel made in the form of an insulated wave guide and a base, a heat sensitive element. Besides, the heat sensitive element is made of non-alloyed single-crystal silicon in the form of the Bragg grating formed in an insulated wave guide. The wave guide may contain more than one heat sensitive element.
EFFECT: simplified integration of an electronic module temperature sensor with components of radioelectronic devices.
2 cl, 4 dwg
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