PHOTOELECTRIC PRESSURE SENSOR Russian patent published in 2016 - IPC G01L11/02 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measurement equipment and can be used to measure liquids and gases pressure. Photoelectric sensor comprises elastic element in form of main shaped silicon crystal with support frame, measuring square diaphragm with rigid centre and V-shaped groove passing along axis of symmetry of support frame and rigid centre through one of sides of frame, in which optical fibre is located and glued, one receiving radiation end located outside elastic element and integrated photodiode, wherein photoelectric pressure sensor according to invention includes additional silicon crystal with two holes, additional integrated photodiode, two auxiliary V-shaped grooves, cylindrical guides and U-shaped groove, above which opposite radiating end of optical fibre is located and which passes along axis of symmetry of support frame, crossing other opposite side of frame, and width of which is greater than size of photodiode, both photodiodes are located on additional crystal one above the other, separated by narrow gap and switched on differentially, radiating end of the optical fibre is directed on diodes, and additional crystal itself is attached to outer edge of elastic element support frame perpendicular to measuring square diaphragm plane, and sensor structure accurate optical alignment is achieved by means of holes on additional chip to receive cylindrical guides arranged in auxiliary V-shaped grooves arranged on elastic element support frame on both sides of optical fibre.

EFFECT: invention allows to reduce non-linearity of converter characteristics and initial output signal.

1 cl, 3 dwg