FIELD: physics.
SUBSTANCE: amplitude fibre-optic pressure sensor comprises a silicon membrane elastic element with a rigid centre, an optical fibre attached to the silicon membrane elastic element capable of moving together with the rigid centre of the silicon membrane elastic element in proportion to the measured pressure, and a photodetector. The sensor includes an additional photodetector, wherein both photodetectors are connected on a differential circuit and are mounted on a separate silicon plate which is mounted in parallel to said silicon membrane elastic element.
EFFECT: designing a sensor having a monotonous conversion characteristic with reduced nonlinearity of the conversion characteristic.
1 dwg
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Authors
Dates
2016-01-27—Published
2014-07-22—Filed