AMPLITUDE FIBRE-OPTIC PRESSURE SENSOR Russian patent published in 2016 - IPC G01L11/00 

FIELD: electronics.

SUBSTANCE: invention relates to sensor electronics and can be used for measuring parameters of process media, in medicine. Disclosed amplitude fibre-optic pressure sensor comprises silicon membrane elastic element with rigid centre, optical fibre, transmitting radiation from external source and fixed on membrane elastic element with possibility of being moved only along with its rigid centre proportional to measured pressure, and one photodetector. At that, proposed device comprises additional photodetector, mirror and two parallel silicon plates arranged perpendicular to membrane elastic element. Besides, both photodetectors are connected as per differential circuit and are located on one silicon plate, and on other plate there is mirror, which is flat reflecting surface of crystallographic orientation of type (100) with pyramid-shaped recesses, walls of recesses converge at one point, and crystallographic orientation walls of type (111).

EFFECT: technical result is increase of sensitivity and reduced nonlinearity of converter characteristics.

1 cl, 1 dwg