FIELD: gas industry.
SUBSTANCE: invention can be used for gas analysis of combustible gases and vapors. This invention consists in the fact that microchip of planar thermo catalytic sensor of combustible gases and vapours consists of common, for operating and comparative sensitive elements, porous substrate from anodic aluminium oxide with platinum thin-film configured coating, parts of which are located on opposite sides of substrate and are made in form of meander, serve as micro heaters-meters and heating of microchip to operating temperature and differential measurement of output signal. At that, sizes of micro heaters-measuring devices are restricted to values, whereat film heat removal mode is ensured.
EFFECT: technical effect: improved parameters of sensitive elements and characteristics of sensor.
13 cl, 1 tbl, 5 dwg
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Authors
Dates
2016-08-10—Published
2015-04-29—Filed