FIELD: gas industry.
SUBSTANCE: invention can be used for gas analysis of combustible gases and vapors. This invention consists in the fact that microchip of planar thermo catalytic sensor of combustible gases and vapours consists of common, for operating and comparative sensitive elements, porous substrate from anodic aluminium oxide with platinum thin-film configured coating, parts of which are located on opposite sides of substrate and are made in form of meander, serve as micro heaters-meters and heating of microchip to operating temperature and differential measurement of output signal. At that, sizes of micro heaters-measuring devices are restricted to values, whereat film heat removal mode is ensured.
EFFECT: technical effect: improved parameters of sensitive elements and characteristics of sensor.
13 cl, 1 tbl, 5 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD TO MEASURE PRE-EXPLOSIVE CONCENTRATIONS OF FLAMMABLE GASES IN AIR | 2013 |
|
RU2544358C2 |
| METHOD FOR MEASURING CONCENTRATION OF COMBUSTIBLE GASES AND VAPORS IN AIR BY DIFFUSION-TYPE THERMOCATALYTIC SENSOR | 2015 |
|
RU2623828C2 |
| METHOD AND APPARATUS FOR DETECTING PRE-EXPLOSION CONCENTRATION OF METHANE IN AIR | 2010 |
|
RU2447426C2 |
| METHOD TO DETECT METHANE IN AIR | 2011 |
|
RU2531022C2 |
| PROCEDURE MEASURING CONCENTRATION OF METHANE BY MEANS OF THERMOCHEMICAL ( THERMOCATALYTIC ) SENSOR | 2001 |
|
RU2210762C2 |
| METHANE CONCENTRATION MEASUREMENT AND DEVICE TO THIS END | 2012 |
|
RU2510499C1 |
| THERMOCATALYTIC SENSOR BASED ON CERAMIC MEMS PLATFORM AND METHOD FOR ITS MANUFACTURE | 2021 |
|
RU2770861C1 |
| MANUFACTURING METHOD OF SENSITIVE CATALYTIC ELEMENT OF THERMOCHEMICAL TRANSMITTER | 2011 |
|
RU2460064C1 |
| CATALYST OF OXIDATING COMBUSTIBLE GASES, METHOD OF ITS PRODUCTION AND METHOD OF SYNTHESIS OF IRIDIUM-CONTAINING CONNECTION-PREDECESSOR | 2016 |
|
RU2635111C1 |
| FUEL GAS AND VAPORS CONCENTRATION ANALYZER | 0 |
|
SU1741043A1 |
