THERMOCATALYTIC SENSOR BASED ON CERAMIC MEMS PLATFORM AND METHOD FOR ITS MANUFACTURE Russian patent published in 2022 - IPC G01N25/32 G01N27/16 

FIELD: measuring technology.

SUBSTANCE: invention relates to gas analysis devices, namely thermocatalytic type gas sensors, and is intended to implement a more cost-effective and reproducible method for their manufacture. The invention can be used in various fields of science, industry and technology to detect and determine the concentration of flammable gases and vapors in the atmosphere. A thermocatalytic sensor based on a ceramic MEMS platform contains a microheater, current leads of a microheater and a layer of catalytically active material that are formed on a thin membrane of LTCC glass ceramics 10-30 microns thick, which covers a substrate of LTCC glass ceramics 0.2–1 mm thick, in which a hole with a diameter of 3-5 mm is made, while the microheater is formed on a portion of the membrane located above a hole. A layer of catalytically active material is formed on the reverse side of the LTCC membrane relative to the microheater in the area of the microheater location. The formation of the microheater and the current leads of the microheater is carried out by aerosol printing, and the formation of a layer of catalytically active material is carried out by microplotter printing. Dispersion based on platinum nanoparticles with an average size in the range of 10-50 nm, with a viscosity in the range of 1-50 MPa·s, in which the platinum content is 20-30 wt. % is used as ink for the formation of a microheater and current leads of a microheater by aerosol printing. As ink for the formation of a layer of catalytically active material by microplotter printing, a dispersion based on metal nanoparticles with catalytic activity with an average size in the range of 10-50 nm, with a viscosity in the range of 1-50 MPa·s, in which the metal content is 20-30 wt. %, in particular a dispersion based on palladium nanoparticles, is used.

EFFECT: reduction of the spread in the performance characteristics of the manufactured devices, reduction of the power consumed by the device.

3 cl, 2 dwg