FIELD: chemistry.
SUBSTANCE: invention relates to production of polycrystalline silicon. In process of producing silicon are formed steam-gas mixtures containing vapour of chlorosilanes, hydrogen and hydrogen chloride. For extraction of chlorosilanes, hydrogen and hydrogen chloride, method comprises preliminary fractional condensation in heat exchangers and subsequent separation of remaining part of chlorosilanes and other components of mixture by absorption, desorption and rectification. According to method for cooling working medium at all stages of its processing, coolant used is silicon tetrachloride, obtained from processed working medium.
EFFECT: invention improves efficiency of process.
1 cl, 1 dwg
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Authors
Dates
2016-09-10—Published
2015-03-12—Filed