METHOD OF EXTRACTING COMPONENTS FROM STEAM-GAS MIXTURES FORMED DURING PRODUCTION OF POLYCRYSTALLINE SILICON Russian patent published in 2016 - IPC C01B33/107 B01D53/14 

Abstract RU 2596775 C1

FIELD: chemistry.

SUBSTANCE: invention relates to production of polycrystalline silicon. In process of producing silicon are formed steam-gas mixtures containing vapour of chlorosilanes, hydrogen and hydrogen chloride. For extraction of chlorosilanes, hydrogen and hydrogen chloride, method comprises preliminary fractional condensation in heat exchangers and subsequent separation of remaining part of chlorosilanes and other components of mixture by absorption, desorption and rectification. According to method for cooling working medium at all stages of its processing, coolant used is silicon tetrachloride, obtained from processed working medium.

EFFECT: invention improves efficiency of process.

1 cl, 1 dwg

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RU 2 596 775 C1

Authors

Bessonnyj Evgenij Anatolevich

Mashkovtsev Pavel Dmitrievich

Sidorov Viktor Mikhajlovich

Dates

2016-09-10Published

2015-03-12Filed