FIELD: machine engineering.
SUBSTANCE: fluid flow controller comprises a channel for fluid flow between the inlet and the outlet; control chamber forming part of a channel for fluid flow; a membrane adapted to the pressure in the control chamber perception; and first and second devices to communicate with the membrane adjacent to the control chamber. The first device to interact with the membrane includes an annular member comprising a clamping portion that is configured to clamping the peripheral edge of the membrane, and a support portion having a first curved surface. A second device for interacting with the membrane includes a support plate for the membrane, whereby the biasing member housed in the loading chamber, applies force to the membrane. Mentioned membrane supporting plate has a second curved surface. Mentioned first and second curved surfaces respectively adjoin the first and second diaphragm portions that move in response to pressure changes in the control chamber, thereby reducing the stress concentration occurring at mentioned first and second parts of the membrane during operation of fluid flow controller.
EFFECT: reduction of stress concentration in the membrane.
13 cl, 9 dwg
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Authors
Dates
2017-08-02—Published
2012-02-22—Filed