FIELD: measuring equipment.
SUBSTANCE: object is illuminated by laser radiation, the radiation reflected from the object interfering in the laser is converted into an electrical autodyne signal. Laser radiation with frequency equalling to ω0 is modulated according to the harmonic law with frequency ν by modulating the laser power supply current. The wavelength of the radiation is changed by an amount of Δλ; the amplitude component of the autodyne signal is filtered at a frequencyν. The signal is decomposed into a spectral series, the amplitude of the 2n-th (C2n) and 2n+2-th (C2n+2) harmonics of the spectrum or 2n+1-th (C2n+1) and 2n+3-th (C2n+3) harmonics of the spectrum of the autodyne signal. The value of the argument of the Bessel function of the first kind σ Is calculated with respect to C2n/C2n+1(σ) or C2n+1/C2n+3(σ), respectively. The distance to the object L is found by the formula .
EFFECT: significant increase in the accuracy of measurement of the amplitude of the nanovibrations of the object.
5 dwg
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Authors
Dates
2017-08-30—Published
2016-05-17—Filed