FIELD: measuring equipment.
SUBSTANCE: diffraction method of measuring the linear object size involves obtaining a diffraction pattern from an object, scanning it, converting the intensity distribution to an electrical signal. The set task is solved at the stage of measuring information extraction by using inflection points in the oscillating signal that occurs, when the diffraction pattern is registered, the position of which is constantly changing the uneven distribution of the irradiating field amplitude in the plane of the measured object.
EFFECT: decreasing the result effect of measuring the object size of the uneven distribution of the irradiating field amplitude in the plane of the measured object.
2 dwg
