DIFFRACTION METHOD FOR MEASURING LINEAR SIZE OF OBJECT Russian patent published in 2023 - IPC G01B11/02 G01B11/08 

FIELD: measurement equipment.

SUBSTANCE: invention can be used to measure the linear (transverse) size of various products, for example, microwires or fibres, gaps or slits with micron dimensions, microholes and round screens, as well as suspensions of microparticles or biological suspensions. The diffraction method of measuring the linear size of an object consists in irradiating the measured object with a coherent monochromatic beam of light, forming a diffraction pattern, which is scanned while simultaneously levelling the intensity of the diffraction maxima and converting the resulting measuring signal into an electrical signal, which is differentiated three times in succession, measuring the amplitude values after the first and the third differentiation, at the moment of equality of the amplitude values of the first and the second derivatives of the signal, the ratio of the amplitude values of the third to the first derivative of the recorded signal is calculated, the size of the measured product is judged by the result of extracting the square root of the ratio of the amplitude values of the third and the first derivatives.

EFFECT: improved accuracy of measuring the size of the controlled object by eliminating the influence of uneven signal amplitude that occurs after the functional transformation of the diffraction pattern.

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