METHOD FOR PRODUCING CO-P AMORPHOUS FILMS ON DIELECTRIC SUBSTRATE Russian patent published in 2017 - IPC C23C18/18 C23C18/32 C23C18/36 

FIELD: chemistry.

SUBSTANCE: invention relates to chemical deposition of magnetically soft and magnetically rigid films of cobalt-phosphorus composition used as media for magnetic and thermomagnetic recording for the creation of microelectromagnetic mechanical sensors (MEMS), as well as in sensors of weak magnetic fields, in microwave devices: filters, power limiters, amplitude modulators, phase manipulators. The method includes cleaning the dielectric substrate, double sensitization in a solution of tin chloride, activation in a solution of palladium chloride, and precipitation of a Co-P magnetic film. In this case, between the stages of sensibilization, heat treatment is carried out at a temperature of 300-450°C, and the deposition of the Co-P magnetic film is carried out on the dried substrate from a solution containing, g/l: cobalt sulfate CoSO₄⋅7H₂O - 10, sodium hypophosphite NaH₂PO₂⋅H₂O - 7.5, sodium citrate Na₃C₆H₅O₇ - 25, at 95-100°C and pH of the solution from 7.1 to 9.6, which is set by adding alkali to the solution.

EFFECT: production of both high-coercivity and low-coercivity Co-P films and simplification of the technology by reducing the number of technological operations.

1 dwg, 1 tbl