MANIPULATOR FOR SUBMICRON DISPLACEMENTS Russian patent published in 2019 - IPC B25J7/00 G02B21/32 A61B34/00 

FIELD: machine building.

SUBSTANCE: invention relates to mechanical engineering and can be used in tunnel and electron microscopy, precision lithography, microsurgery and biological research. Manipulator for submicron displacement contains installed on the basis of 1 output link in the form of a mobile platform 2. Base 1 and platform 2 are connected by means of kinematic links consisting of kinematic pairs and linear piezomotors. Platform 2 is a triangular prism, in which on each side face and at the vertices of the triangle are fixed support links of 3 kinematic pairs 4, coupled with levers 5, placed along the side faces. Each lever 5 from one end is cantileverly connected to the base 1 using a fixed seal 6 and the hinge 7 with the possibility of swing around the vertical axis of the hinge 7, and from the other end, by means of a kinematic chain comprising a kinematic pair 8 and a linear piezomotor 9. Levers 5 transmit the movement from the linear piezomotors 9 to the movable platform 2 and have a large gear ratio, which can be further increased to increase the accuracy of positioning by simply changing their length.

EFFECT: invention provides controlled, reliable movement of objects with submicron accuracy, and allows to increase the accuracy of displacement.

1 cl, 2 dwg