FIELD: physics.
SUBSTANCE: invention relates to detection of metal and dielectric parameters of semiconductor heterostructures. Device for scanning radio frequency optical modulation spectroscopy comprises at least two metal electrodes made in the form of rods located inside the optical fiber or in the light-reflecting shell or in the protective coating.
EFFECT: high localization of measurements and possibility of finding use as nondestructive method of controlling metal and dielectric semiconductor structures.
5 cl, 4 dwg
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