MICROELECTROMECHANICAL PENDULUM ACCELEROMETER HAVING TWO MEASUREMENT RANGES Russian patent published in 2019 - IPC G01P15/125 

FIELD: electricity.

SUBSTANCE: group of inventions relates to microelectromechanical systems (MEMS). Acceleration sensor, comprising electrodes forming capacitors, capacitance of which varies as a function of distance between electrodes, control unit is configured to measure capacitance and to perform control operation, which comprises selectively precise control stage, on which first voltage is applied between one of the fixed electrodes and the movable electrode, while the other fixed electrode is at the same potential as the movable electrode; and an extended control step, on which a second voltage is applied between one of the fixed electrodes and the movable electrode, and the other fixed electrode is at the same potential as the movable electrode, wherein the second voltage in absolute value is greater than the first voltage.

EFFECT: technical result is higher accuracy of determining acceleration, simple design of acceleration sensor.

9 cl, 3 dwg