FIELD: measurement.
SUBSTANCE: invention relates to measurement equipment, namely to devices for three-dimensional analysis of refraction index of material using interferometry-based optical devices, and can be used for tomographic inspection of samples of optical products: optical fibers and their workpieces, gradient lenses, various optics and microelectronics products, including those obtained by additive techniques from polymer and other transparent materials. Device for measuring distribution of refraction index of transparent samples has a coherent light source, a Mach–Zehnder interferometer, a recording system and a test sample mounting unit. Interferometer is equipped with an input phase-shifting unit and a beam splitter forming the reference and measuring channels. Test sample installation unit is located in the measuring channel and contains a cell with an immersion liquid and a rotary device. Device is also provided with a similar reference sample installation unit located in the support channel and containing a cell with an immersion liquid and a rotary device.
EFFECT: invention increases accuracy and range of measurements.
4 cl, 3 dwg
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Authors
Dates
2020-07-23—Published
2019-12-24—Filed