METHOD AND APPARATUS FOR VERIFYING OPERATION OF A TDLAS SYSTEM Russian patent published in 2020 - IPC G01N21/39 B01D53/34 

FIELD: measuring equipment.

SUBSTANCE: group of inventions relates to a tunable diode (TDLAS) laser absorption spectroscopy system. Determination of characteristics of gaseous compounds inside process chamber includes selective projection of beam of first selected frequency of laser generation through chamber. Beam is optically connected to detector for detecting process transmission spectrum, absorption dip of which, caused by characteristic of gaseous compound, is at selected laser generation frequency. Beam is selectively projected through a fiber Bragg grating, which is formed in the core of the fiber-optic cable for partial reflection of at least part of the beam of the first selected laser generation frequency with transmission of the remaining part of the beam. Remaining part of the beam is characterized by the transmission spectrum of the FBG simulating the absorption dip caused by the gaseous compound of interest, at or near the selected laser lasing frequency. It is optically connected to the detector. Output signals of the detector are tracked to compare the transmission spectrum of the FBG with any transmission spectrum of the process obtained in the process chamber.

EFFECT: technical result consists in creation of durable and ready for operation in field conditions means for checking proper operation of TDLAS system and reliability of produced results.

13 cl, 4 dwg