FIELD: chemistry.
SUBSTANCE: present invention relates to barrier films including barrier PECVD-coating from diamond-like carbon, and to a method of making such films, and also to multilayer packaging materials including such films, in particular, intended for packing of liquid food products. Described is a barrier film or sheet (10a; 10b) for use in multilayer packaging materials for liquid food products, comprising substrate (11) and wear-resistant barrier coating (12) of diamond-like carbon (DLC) deposited thereon by vapour deposition, which creates gas-barrier properties, as well as barrier properties with respect to water vapour, in packaging material and packages made therefrom, wherein the wear-resistant barrier DLC coating (12) is a single-layer gradient diamond-like coating which, from the surface of separation with the polymer film substrate, over the depth of the coating to its surface, is a gradient reduced concentration of oxygen ions to minimum value and subsequent increase, wherein gradient reduction has slope from 5⋅103 to 5⋅104, such as from 8⋅103 to 2⋅104, such as 104, based on nanometer of thickness of coating, wherein minimum value is concentrated in location from 40 to 60 %, such as from 45 to 55 %, such as at 50 % of coating depth, when measured from surface of barrier coating, as shown by curve of intensity versus thickness at analysis of surface using dynamic time of flight mass-spectrometry of secondary ions, ToF-SiMS calibrated by thickness measurement using transmission electron microscopy (TEM), while concentrations of carbon and hydrogen ion groups remain substantially constant over the entire depth of the coating, wherein wear-resistant barrier DLC-coating (12) is applied by method of chemical vapour deposition enhanced with radio-frequency plasma, with plasma inductively coupled with power and having homogeneous composition over the whole area with high electron density from 1⋅1012 to 1⋅1014 per cm3, and supported by resonance frequency of lattice structure of at least one large antenna of large area. Also disclosed are: a multilayer packaging material, a packaging container and a method of making a barrier film or sheet.
EFFECT: technical result is improved mechanical properties of barrier film.
22 cl, 11 dwg, 1 ex
