AUTOMATIC ELECTRON GUN WITH AN ANASTIGMATIC DEVICE AND A METHOD FOR CORRECTING ELECTRON BEAM ASTIGMATISM FOR AN ELECTRON GUN Russian patent published in 2022 - IPC H01J29/48 H01J37/147 

FIELD: electron beam processing.

SUBSTANCE: invention relates to the field of electron beam processing and, in particular, relates to an automatic electron gun with an anastigmatic device and a method for correcting electron beam astigmatism for an electron gun. The detection device uses a split Rogowski coil, which uses the differential signals as the output signal and the minimum value of the differential signals as the correction target of the anastigmatic device, which simplifies the detection signal processing method, eliminates the influence of common-mode interference signals, and improves the detection sensitivity and accuracy. The optimal drive current of the anastigmatic device is determined by the axes to speed up calculations. The weighted values ​​of the amplitude and average value of the detection signals more fully reflect the difference in the morphology of the electron beam trace. Using the pooled weighted data as a benchmark, two rounds of finding and confirming the "optimum" value further increase reliability and reduce randomness.

EFFECT: improving the reliability of the electron gun by improving the effect of correcting the morphology of the electron beam trace.

9 cl, 5 dwg