DIFFERENTIAL PRESSURE SENSOR WITH OVERPRESSURE PROTECTION Russian patent published in 2024 - IPC G01L13/02 

FIELD: measuring equipment.

SUBSTANCE: invention relates to pressure transducers and can be used in various fields of science and technology related to measurement of pressure difference. Pressure sensor has a housing in which there are two cavities filled with a low-compressible electrically insulating liquid. Each cavity is sealed with a pressure-sensitive separation membrane located with a gap relative to the shaped bases, wherein the pressure created by the membranes on the electrically insulating liquid is transmitted through the flow channels (hydraulic throttles) to the measuring unit, consisting of a compensation membrane and semiconductor strain-sensitive elements based on a silicon-on-silicon (SOS) structure. After the separating membrane there is an additional membrane with a throttling hole, located with a gap relative to the substrate, on which there is a hydraulic throttle in the form of a groove in the form of a spiral so that under the effect of overload pressure the gap between the additional membrane and the substrate decreases. At that, due to the additional membrane pressing to the substrate a spiral throttle is formed, cross-section of which decreases with increase of overload pressure with steep front, which eliminates overload pressure ingress on measuring SOS membrane.

EFFECT: creation of a pressure difference sensor with overload protection.

1 cl, 5 dwg