METHOD OF SAW-TOOTH TYPE DIFFRACTION GRATING MANUFACTURING Russian patent published in 2025 - IPC G02B5/18 

FIELD: optical instrument making.

SUBSTANCE: invention relates to optical instrument-making and a method of making a sawtooth diffraction grating. Method involves applying a layer of chromium onto the surface of a silicon substrate. Resist layer is deposited on the chrome, wherein a pattern of alternating parallel strips is illuminated with a laser, light or electron beam and then developed. Further, method comprises performing anisotropic chemical etching or plasma-chemical etching, accompanied by formation of a binary profile of relief, with protrusions. Chromium is sputtered onto the prepared sample of the binary grating in the sample swinging mode in the angle range from normal incidence of 90 degrees relative to sample to 30 degrees for formation of saw-tooth profile of chromium between projections of the binary grating. Further, the second anisotropic plasma-chemical etching is carried out, during which the initial binary grating is removed and a sawtooth grating remains. Then, vertical chromium filaments left after chromium sputtering in swinging mode are removed in cerium etchant solution, and a reflecting layer is sputtered.

EFFECT: improved quality of the grating and high efficiency of inputting radiation into the waveguide using a diffraction grating.

1 cl, 10 dwg