VACUUM COATING APPARATUS Russian patent published in 1995 - IPC

FIELD: thin film deposition. SUBSTANCE: apparatus has blades 9 which are secured in chucks 8 of holders 7 and assembled unit is inserted into openings 6 of faceplates 4 and 5. Openings 6 are angularly spaced one with respect to the other so that they may not be axially aligned along axis of shaft 3, which is disposed in openings 12 of eccentric 2. Shaft 3 has diameter lesser than that of opening 12. Radial gap a is such that with selected ratio of diameters irrational number is not divisible by integer number. As a result blade 9 does not repeat its former position in the optimum zone of condensate flow to eliminate possibility of absence of coating on some portions of blade surface. Such conditions define the value of radial gap a₁. So blade 9 may be turned d₂/d₁ times in lower opening of faceplates 4 and 5, with lower opening being at minimum distance from melt surface in crucible. Radial gap a₁ allows shaft 3 to turn d₄/d₃ times in its lower position. Thus holder 7 is turned d₄/d₃ times in its lower optimum position relative to crucible. Axial gap b₂ allows blade 9 to be in its optimum position relative to crucible. When shaft 1 is turned through 180 deg, faceplate 5 is in its optimum position relative to crucible. Axial gap b₁ allows blades 9 to vary distance between band strip surfaces and condensate melt flare symmetry plane. EFFECT: increased uniformity of coating deposition 3 cl, 3 dwg