FIELD: thin film deposition. SUBSTANCE: apparatus has elongate reciprocating shaft carrying products to be treated, follower in a reducing pair including elongate shaft cantilever drive eccentric sleeve. Follower has finger 8 radially mounted on shaft and provided with ball 9, and slot 10 defined between two similar sleeves-followers 11 arranged in opposed relation. Such follower in a shaft-sleeve pair does not influence transmission ratio. Reciprocating motion is provided by action of elongate shaft system weight. EFFECT: improved quality of coating by increased uniformity, wider operational capabilities and enhanced reliability in operation. 3 dwg
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