FIELD: instrumentation engineering. SUBSTANCE: pressure under measurement acts on diaphragm 1 and causes deformation of strain-sensitive transistors 2 and 3 and, hence, changes their coefficients of strain sensitivity which are of different sign due to appropriate selection of location of symmetry axes of strain-sensitive transistors 2 and 3; consequently, conversion factor is increased. EFFECT: improved conversion factor. 1 dwg
| Title | Year | Author | Number | 
|---|---|---|---|
| INTEGRATED PRESSURE TRANSDUCER | 0 | 
 | SU1471094A1 | 
| 0 | 
 | SU1783331A1 | |
| CONVERTER OF MECHANICAL ACTION INTO ELECTRICAL SIGNAL | 1985 | 
 | SU1387812A1 | 
| INTEGRAL CONVERTER OF MECHANICAL EFFORT | 0 | 
 | SU1328700A1 | 
| SOKOLOV'S SILICON MICRO-ELECTROMECHANICAL CONVERTER | 2006 | 
 | RU2327125C2 | 
| 0 | 
 | SU542509A1 | |
| FREQUENCY RESONANT DIFFERENTIAL PRESSURE SENSOR AND FREQUENCY RESONANCE DIFFERENTIAL PRESSURE SENSOR | 2017 | 
 | RU2690699C1 | 
| INTEGRATED STRAIN TRANSDUCER AND METHOD OF ITS MANUFACTURE | 0 | 
 | SU1827532A1 | 
| INTEGRATED STRAIN CONVERTER | 1988 | 
 | SU1545877A1 | 
| INTEGRATED PRESSURE TRANSDUCER | 0 | 
 | SU1749731A1 | 
Authors
Dates
1994-02-28—Published
1985-12-24—Filed