FIELD: instrumentation engineering. SUBSTANCE: pressure under measurement acts on diaphragm 1 and causes deformation of strain-sensitive transistors 2 and 3 and, hence, changes their coefficients of strain sensitivity which are of different sign due to appropriate selection of location of symmetry axes of strain-sensitive transistors 2 and 3; consequently, conversion factor is increased. EFFECT: improved conversion factor. 1 dwg
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INTEGRATED PRESSURE TRANSDUCER | 0 |
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0 |
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SU1783331A1 | |
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Authors
Dates
1994-02-28—Published
1985-12-24—Filed